The Evactron from XEI Scientific, Inc. removes hydrocarbons, organics and surface carbon from samples and electron microscopes.
 
Carbon deposits change
the apparent width of Cu
lines on a Si substrate

  • Remove unsightly scan squares
  • Shrink false EDS carbon peaks
  • Minimise measurement errors

 

 

 

 

  

Left: Scanned area on a Si sample.  Right: Same area after 10 minutes of specimen and chamber cleaning using the Evactron, then re-scanning.

Click on the links to the right for more information or contact us.

Further Information

Why use an Evactron?

Overview (PPS, 1.9 MB)

Control of SEM Environmental Contamination (PDF, 1.9 MB)

Improved Carbon EDS Analysis (PDF, 470 KB)

Theory of Operation

Evactron Downstream Cleaning (PDF, 45 KB)

Product Datasheets

Evactron Model C (PDF, 116 KB)

Evactron Model 25 (PDF, 159 KB)

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